Index of various semiconductor manufacturing equipment
As of Jan 31, 2012
| Major Categories | Sub-Categories | Equipment Examples | ||
|---|---|---|---|---|
| A | Semiconductor Design Equipment | Pattern Generator, Plotter, Engineering Workstation, Logic Simulator, Circuit Simulator, Design Equipment, Logic Analyzer, Others | ||
| B | Mask/Reticle Mfg. Equipment | 1 | Photolithography Processing Equipment | Electron Beam Exposure Equipment, Laser Exposure Equipment, Pattern Generator, Contact Printer, Photo Repeater, Coater, Resist Stripper, Develop / Bake / Descum Equipment |
| 2 | Thin Film Deposition, Etching, Cleaner, & Dryer | Vacuum Evaporation Equipment, Sputter, CVD, Cleaner, Etcher, Dryer, Scrubber | ||
| 3 | Inspection and Metrology Equipment & Others | Mask/Reticle Defect Inspector, Defect Corrector, Mask Particle Inspector, Defect Inspector | ||
| C | Wafer Manufacturing Equipment | 1 | Single Crystal Manufacturing Equipment | Single Crystal Growing Furnace |
| 2 | Wafer Processing Equipment | Slicer, Lapping Equipment, Polishing Equipment, Grinding Equipment, Wafer Marking Equipment | ||
| 3 | Inspection and Metrology Equipment & Others | Life Measuring Equipment, Crystal Defect Detector, In process measuring Equipment, Other Measuring Equipment | ||
| D | Wafer Processing Equipment | 1 | Exposure & Direct Write Equipment | Contact Proximity Aligner, Projection Aligner (equal magnification, reduction), Electron Beam Exposure Equipment |
| 2 | Photoresist Processing Equipment | Coater, Developer, Resist Stripping Equipment, Ashing Equipment, Baking Equipment, Resist Stabilizing Equipment, Wafer Peripheral Exposure Equipment | ||
| 3 | Dry Etch Equipment | Dry Etch Equipment | ||
| 4 | Surface Conditioning Equipment | Wet Etching Equipment, Dry Cleaning Equipment, Wet Cleaning Equipment, Wafer Scrubber, Drying Equipment, High Pressure Jet Cleaner | ||
| 5 | Thermal Process Equipment | Oxidation Equipment, Thermal Diffusion Furnace, Annealing Equipment | ||
| 6 | Ion Implantation Equipment | High Current Ion Implanter, Medium Current Ion Implanter, High Voltage Ion Implanter, Doping Equipment | ||
| 7 | Thin Film Deposition Equipment | |||
| 7-1. CVD Equipment | Atmospheric Pressure CVD, Subatomospheric CVD, Low Pressure CVD, Plasma Enhanced CVD, MetalCVD, ALD | |||
| 7-2. Sputtering Equipment | Sputtering Equipment | |||
| 7-3. Other Thin Film Deposition Equipment | Vacuum Evaporation Equipment, Silicon Epitaxial Growing Equipment, Compound Semiconductor Epitaxial Equipment(MOCVD,MBE), Plating Equipment, Spin on tool | |||
| 8 | Metrology & Inspection Equipment | Defect Inspector, Particle Inspecter, Dust counter , CD SEM , Film Thickness Inspector, Reflectance Measurement, Auger Electron Spectroscope, Infrared Spectro-photometer, Sheet Resistance Measurement, Life Time Measurement, Other Measuring & Analysing | ||
| 9 | CMP Equipment | CMP Equipment, CMP Cleaning Equipment | ||
| 10 | Other Wafer Process Equipment | Wafer Marking, Mark Reader, Bump Plating , Back Grinder Tape Sticker, Back Grinder , Back Grinder Tape Peeler, Backside Etcher | ||
| E | Assembly & Packaging Equipment | 1 | Dicing Equipment | Scriber, Dicer, Wafer Mounting Equipment |
| 2 | Bonding Equipment | ie Bonder, Hybrid Bonder, Wire Bonder, Inner-Lead Bonder, Outer-Lead Bonder, Flip-chip Bonder | ||
| 3 | Packaging Equipment | Molding Equipment, Deflasher, Sealing Furnace, Solder Plating Equipment, Solder Ball Mounter, Trim & Forming Equipment, Marker | ||
| 4 | Test, Evaluation & Other Assembly Equipment | Package Inspector, Leak Detector, Pull Tester, X-ray Equipment, Lead Inspector, Other Measuring Equipment | ||
| F | Test / Inspection Equipment | 1 | Automated Test Equipment | |
| 1-1. SOC & Logic Test Equipment | Logic Test Equipment, ASIC Verification Equipment | |||
| ( 1-3 Linear & Mixed Signal Equipment ) | Linear Test Equipment, Mixed Signal Test Equipment, Analog Test Equipment, SOC Tester | |||
| ( 1-4 Other Test Equipment ) prev. | Transistor Test Equipment, LED Test Equipment, Image Sensor Test Equipment, Electron Beam Test Equipment, Laser Beam Test | |||
| 1-2. Memory Test Equipment | Memory Test Equipment | |||
| 2 | Prober Equipment | Prober | ||
| 3 | Handler | Handler | ||
| 4 | Aging Equipment | Aging Equipment, Burn-in Equipment, IC Inserting Equipment, IC Removing Equipment | ||
| 5 | Other Test/Inspection Equipment | Temperature Testing, Humidity Testing, Shock Testing, Pressure Cooker, Leak Detector, Laser Processing Equipment, Vibration Testing, Various Life Measuring, Waveform Analyzer, Other Measuring Equipment | ||
| G | Fab Facility & Related Equipment | 1 | Factory Automation Equipment | Intra-Bay Wafer Transportation Equipment, Inter-Bay Wafer Transportation Equipment, Stocker |
| 2 | DI Water & Chemicals Control Equipment | DI Water Producing, Ultrafiltering, Reverse Osmosis, Sterilizing, Chemicals Suppling, Slurry Suppling, Chemical Purifing, Waste Cntorol | ||
| 3 | Various Gas Control Equipment | Gas Producing Equipment, Gas Purifing Equipment, Gas Mixing Equipment, Gas Detecting Equipment, Gas Scrubber | ||
| 4 | Clean Room Facility | Clean Bench, Clean Tunnel, Thermal Chamber, Enviromental Chamber, Air Shower, Pass Box | ||
| 5 | Others Manufacturing Related Equipment | Controling, Central Monitoring, Jig Cleaner & Dryer, Flow Controlling, Taping, Packaging, Gas Measuring or Analyzing | ||