Directors As of May 30, 2024
| Chairman | KAWAI Toshiki |
Tokyo Electron Limited | President & CEO |
|---|---|---|---|
| Vice Chairmen | USHIDA Kazuo |
NIKON CORPORATION | Chairman of the Board |
| YOSHIDA Yoshiaki |
ADVANTEST CORPORATION | Director, Chairperson of the Board | |
| GOTO Masato |
SCREEN Holdings Co.,Ltd. | Representative Director, President | |
| Chief Executive Managing Directors | WATANABE Kiyoshi |
Semiconductor Equipment Association of Japan (SEAJ) | |
| Executive Managing Directors | TAKEISHI Hiroaki |
Canon Inc. | Senior Managing Director |
| SHIGEZAKI Takashi |
ShibaSoku Co., Ltd. | Chairman & CEO | |
| KOMURO Osamu |
Hitachi High-Tech Corporation | Vice President and Executive Officer | |
| ASAMI Masao |
EBARA CORPORATION | Director, President, Representative Executive Officer, CEO&COO | |
| Directors | SHIMIZU Yasuo | ULVAC, Inc. | Managing Executive Officer, Head of Equipment Business HQ |
| ABE Kenkichi |
USHIO, Inc. | Executive Officer, General Manager, Photon Process Division | |
| KANAI Fumiyuki |
KOKUSAI ELECTRIC CORPORATION | Representative Director, President and Chief Executive Officer | |
| TANAKA Masahiko |
SHIMADZU CORPORATION | Corporate Officer, General Manager, Industrial Machinery Division | |
| OOKA Fumihiko | Yamaha Robotics Holdings Co., Ltd. | （President & Representative Directo, SHINKAWA LTD.） | |
| TAZAWA Toyohiko |
JEOL Ltd. | Director & Senior Executive Officer | |
| HASEGAWA Masayoshi |
MICRONICS JAPAN CO., LTD. | President & CEO | |
| TANAKA Hisashi |
Fujikin Incorporated | President & CEO | |
| HORIBA Atsushi |
HORIBA, Ltd. | Chairman & Group CEO | |
| SENDODA Tatsuya |
Lasertec Corporation | Director, Vice President & Executive Officer | |
| Auditors | KIMURA Ryuichi |
TOKYO SEIMITSU CO., LTD. | President and COO |
| TAKAMATSU Jun |
NuFlare Technology, Inc. | President | |
| SUGAWARA Kazunobu |
SUGAWARA KAZUNOBU CERTIFIED PUBLIC ACCOUNTANT OFFICE | Public Accountant |