Directors
| Chairman | KAWAI Toshiki |
Tokyo Electron Limited | President & CEO |
|---|---|---|---|
| Vice Chairmen | USHIDA Kazuo |
NIKON CORPORATION | Chairman of the Board |
| YOSHIDA Yoshiaki |
ADVANTEST CORPORATION | Representative Director, President & Group CEO | |
| GOTO Masato |
SCREEN Semiconductor Solutions Co.,Ltd. | Representative Director, President | |
| Chief Executive Managing Directors | WATANABE Kiyoshi |
Semiconductor Equipment Association of Japan (SEAJ) | |
| Executive Managing Directors | TAKEISHI Hiroaki |
Canon Inc. | Senior Managing Executive Officer |
| SHIGEZAKI Takashi |
ShibaSoku Co., Ltd. | Chairman & CEO | |
| KOMURO Osamu |
Hitachi High-Tech Corporation | Vice President and Executive Officer | |
| TOGAWA Tetsuji |
EBARA CORPORATION | Executive Officer, President, Precision Machinery Company | |
| Directors | SHIMIZU Yasuo | ULVAC, Inc. | Executive Officer, General Manager of FPD Division |
| ABE Kenkichi |
USHIO, Inc. | Executive Officer, General Manager, Industrial Process Division, Business Management Headquarters | |
| KANAI Fumiyuki |
KOKUSAI ELECTRIC CORPORATION | Representative Director, President and Chief Executive Officer | |
| WATANABE Akira |
SHIMADZU CORPORATION | Director, Member of the Board, Senior Managing Executive Officer | |
| TASHIMA Hirotoshi | Yamaha Robotics Holdings Co., Ltd. | （Director, SHINKAWA LTD.） | |
| TAZAWA Toyohiko |
JEOL Ltd. | Director & Senior Executive Officer | |
| HASEGAWA Masayoshi |
MICRONICS JAPAN CO., LTD. | President & CEO | |
| TANAKA Hisashi |
Fujikin Incorporated | President & CEO | |
| HORIBA Atsushi |
HORIBA, Ltd. | Chairman & Group CEO | |
| OKABAYASHI Osamu |
Lasertec Corporation | Representative Director, President Executive Officer | |
| Auditors | KIMURA Ryuichi |
TOKYO SEIMITSU CO., LTD. | President and COO |
| TAKAMATSU Jun |
NuFlare Technology, Inc. | President | |
| SUGAWARA Kazunobu |
SUGAWARA KAZUNOBU CERTIFIED PUBLIC ACCOUNTANT OFFICE | Public Accountant |